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RISE ProNano Maskless Aligner

Establishing maskless optical lithography at ProNano testbed in Lund

The project aims to strengthen innovation capacity by providing companies and researchers access to advanced infrastructure and expertise. A newly installed Maskless Aligner (MLA) enables optical lithography with sub-micron resolution without costly photomasks, supporting organisations lacking advanced fabrication equipment and process know-how.

Companies face major challenges related to skills supply, access to technology, and increasing sustainability requirements for electronics. The project will enhance resilience and manufacturing readiness by providing capabilities for testing and prototyping semiconductor components.

In the short- to medium-term, the infrastructure will be utilised by companies and other stakeholders to enhance research and innovation capacity and accelerate the adoption of advanced technologies. It will also establish RISE ProNano in Lund as a centre of expertise and an innovation hub for materials development and characterisation.

In the long term, regional capacity in innovation, materials development, and characterisation, with a specialisation in semiconductor technology, will be strengthened. This will be achieved through the establishment and development of research infrastructure, testbeds, and demonstration environments with strong industry involvement and collaboration within the Myfab network. Companies’ capacity to conduct R&D, both internally and in collaboration with external partners, will be enhanced.

Summary

Project name

ProNano Maskless Aligner

Status

Active

Region

Region Skåne

RISE role in project

Project Manager and Performer

Project start

Duration

3 years och 4 months

Total budget

7,450,000 SEK

Funders

Tillväxtverket, Region Skåne

Project members

Contact person

Peter Ramvall

Senior expert

+46 73 079 06 12

Read more about Peter

Contact Peter
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