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Smart energy harvesting with integrated supercapacitor and packaging

The main challenge for all smart sensor devices is self-powering. We design, manufacture and test miniaturized piezo energy harvesters using vibrational energy as autonomous energy supply. This system will be demonstrated in two very demanding applications: leadless pacemaker and WSN for structural health monitoring.

The goal is to tackle the main challenge for all smart devices – self-powering. The project aims to design, manufacture and test a miniaturized autonomous energy supply based on harvesting vibrational energy with piezo-MEMS energy harvesters. The project will integrate several multi-functional technologies and nanomaterials; a MEMS-based multi-axis energy harvester, an ultra-low-power ASIC to manage the variations of the frequency and harvested power, and a miniaturized energy storing supercapacitor, all heterogeneously integrated for cost effective 3D integration.


Project name




RISE role in project

RISE Acreo is partner with the scientific rolls to i) simulate and design MEMS-based PZT harvester, and ii) mechanical & electrical characterisation of harvesters

Project start


4 year

Total budget

8.2 M€


Aixacct, CAIRDAC SAS , Chalmers University of Technology, The Fraunhofer Institute for Reliability and Microintegration IZM, Linköping University/ Integrated Circuits and Systems group, RISE, Silex Microsystems, Spinverse, Vermon



Project website



External press

Supports the UN sustainability goals

3. Good health and well-being
7. Affordable and clean energy
9. Industry, innovation and infrastructure
Cristina Rusu

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Cristina Rusu

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